furnace
Repair & Refurbishment Service
Relocation (De-installation and Re-installation) Service
TEL FURNACE REFURBISH
SEMICONDUCTOR EQUIPMENT REFURBISH
200mm
Alpha 8S SMIF FTPS used -> HTO
Alpha 8S SMIF Used -> D_POLY
Alpha 8S SMIF Used -> High Temp PYRO
Alpha 8SE I/O Used
:LPRO, Nitride, MTO, High Temp Oxide
300mm
α-303i MTO Process → TEOS process
α-303i D-Poly Process → DCS MTO process
KE FURNACE REFURBISH
SEMICONDUCTOR EQUIPMENT REFURBISH
200mm
DJ853, DD853 -> Radical ox Retrofit
300mm
DJ1223V Non L/L → DJ1223VN Type L/L Refurbish
LED EQUIPMENT REFURBISH
DD853 8” -> 4” Anneal
SOLAR CELL EQUIPMENT REFURBISH
DD853 8” -> 6” POCl3
FURNACE HEATER (NEW)
SPECIAL FURNACE HEATER
KE 200,300MM
:RHC (Rapid Heating Cooling), Middle Temp, High Temp Heater
TEL 200,300MM
:FTP(Fast Temperature Process ), Middle Temp, High Temp Heater
PARTS DEVELOPMENT & REPAIR
FURNACE HEATER
KE, TEL 2ND SOURCE PARTS ( DESIGN & PRODUCTION)
Electrical
GFC, Relay Box, KE V-AXIS Robot, Transformer, Cable
MECHANICAL
Manifold, Seal Cap, Support Ring , Stocker, Pipe
PARTS REPAIR
Controller|
TEL : TS-4000,Waves,
Temp/Gas/Pressure/Exhaust CTL
KE : CX-2000/3000, Temp/Gas/Pressure/Exhaust CTL, PLC
MOTOR DRIVE
TEL : X, Y, Z, E, SS, CZ, CX, CY, R-Axis
TEL SMIF (developed in Korea)
Parts Development & Repair
KE RHC HEATER
Special Furnace Heater
KE 200,300mm RHC
TEL FTPS Refurbish
KE, TEL 2nd Source Parts ( Design & Production)
Electrical
GFC, Relay Box, KE V-AXIS Robot, Transformer, Cable
Mechanical
Manifold, Seal Cap, Support Ring , Stocker, Pipe
Parts Repair
Controller
TEL : TS-4000,Waves, Temp/Gas/Pressure/Exhaust CTL
KE : CX-2000/3000,
Temp/Gas/Pressure/Exhaust CTL, PLC
Motor Driver
TEL : X, Y, Z, E, SS, CZ, CX, CY, R-Axis