QUARTZ
 
        
        
      
           
        
        
      
           
        
        
      
              From 4 inch To 12 inch
          Diffusion/LPCVD Quartz Products
Tube  
          Process Tube, Double Tube, Inner/Outer               Tube
Boat  
          Ring Boat, Vertical/Horizontal Boat
          Cap, Pedestal
          Injector, Nozzle
          Others
          From 6 inch To 12 inch
          DRY Etch/Wet Etch Quartz Products
Ring 
          Cover Ring, Shield Ring, Focus Ring,
          Shadow Ring , Pedestal Ring
Plate/Disc 
          Base Plate, Top Disc, Window  
Wet Bath
Robot Chuck, Wafer Guide
Others
 
        
        
      
           
        
        
      
           
        
        
      
    From 6 inch To 12 inch
RTP/THIN FILM Quartz Products
RTP   
          RTP Tube, Wafer Tray, Door Aperture,                  Elbow, Gas Distributor, Quartz Pin 
THIN FILM  
          Bell Jar
          Dome
          Insulator, Window, Liner
 
        
        
      
           
        
        
      
    From 6 inch To 12 inch
Halogen Lamp, UV LAMP
Customer Designed Products

 
                      